O le a le uiga o le TTV, BOW, WARP, ma le TIR i Wafers?

Pe a suʻesuʻeina semiconductor silicon wafers poʻo mea e fai i isi mea, e masani ona tatou faʻafeiloaʻi faʻamatalaga faʻapitoa e pei o: TTV, BOW, WARP, ma atonu TIR, STIR, LTV, ma isi. O a vaega o lo'o fa'atusalia e nei mea?

TTV - Aofa'iga Mafiafiese'iga
BOW — Bow
WARP — Warp
TIR - Faitauga Fa'ailoa Aofa'i
STIR - Faitauga Fa'ailoa Aofa'i Nofoaga
LTV - Fa'alotoifale Mafia Eseese

1. Aofa'iga Mafiafia Eseese - TTV

O le eseesega i le va o le mafiafia aupito maualuga ma le la'ititi o le wafer e fa'atatau i le va'alele fa'asino pe a pipii le wafer ma feso'ota'i vavalalata. E masani ona faʻaalia i micrometers (μm), e masani ona faʻatusalia e pei o: ≤15 μm.

2. Aufana — AUFAU

Ole va'aiga ole va ole la'ititi ma le mamao maualuga mai le ogatotonu ole pito i luga ole va'alele i le va'alele fa'asino pe a o'o i se tulaga e leai se totogi (le fa'apipi'i). E aofia uma ai fa'amau fa'amau (negative bow) ma convex (positive bow). E masani ona fa'aalia i micrometers (μm), e masani ona fa'atusalia e pei o: ≤40 μm.

3. A'O'O'O — WARP

Ole va'aiga ole va ole la'ititi ma le maualuga ole mamao mai le va'ava'ai i le va'alele fa'asino (e masani lava o le pito i tua o le wafer) pe a o'o i se tulaga e leai se totogi (le fa'apipi'i). E aofia uma ai mataupu concave (negative warp) ma convex (positive warp). E masani ona faʻaalia i micrometers (μm), e masani ona faʻatusalia e pei o: ≤30 μm.

4. Faitauga Fa'ailoa Aofa'i - TIR

Pe a faʻapipiʻi le wafer ma faʻafesoʻotaʻi vavalalata, faʻaaogaina se vaalele faʻasino e faʻaitiitia ai le aofaʻi o faʻalavelave o mea uma i totonu o le tulaga lelei poʻo se faʻalapotopotoga faʻapitonuʻu i luga o le wafer surface, o le TIR o le vaʻavaʻa i le va o le maualuga ma le laʻititi mamao mai le wafer surface i lenei vaalele faʻasino.

Fa'avaeina i luga ole poto loloto ile semiconductor mea fa'apitoa e pei ole TTV, BOW, WARP, ma le TIR, XKH e tu'uina atu au'aunaga fa'aagaoioiga fa'aleaganu'u fa'apitoa e fa'atatau i tulaga fa'atauva'a fa'apisinisi. Matou te tuʻuina atu ma lagolagoina le tele o mea faʻapitoa e aofia ai safaira, silicon carbide (SiC), silicon wafers, SOI, ma le quartz, faʻamautinoaina le tulaga ese o le mafolafola, mafiafia mafiafia, ma le tulaga maualuga mo faʻaoga faʻapitoa i optoelectronics, masini eletise, ma MEMS. Fa'atuatuaina i matou e tu'uina atu vaifofo fa'atuatuaina ma le sa'o lelei o masini e fetaui ma ou mana'oga sili ona faigata.