6 i le Silicon Carbide 4H-SiC Semi-Insulating Ingot, Dummy Grade
Meatotino
1. Meatotino Faaletino ma Fauga
● Ituaiga Mea: Silicon Carbide (SiC)
●Polytype: 4H-SiC, fausaga tioata hexagonal
●Tamita: 6 inisi (150 mm)
●Mafia: Fa'atonu (5-15 mm masani mo le togi fa'ata)
●Fa'asinomaga Crystal:
oPatamai: [0001] (C-vaalele)
o Filifiliga lona lua: Off-axis 4° mo le fa'aleleia atili o le fa'atupulaia o le epitaxial
●Tulaga Mafolafola Tulaga Muamua: (10-10) ± 5°
●Fa'asinomaga Lua mafolafola: 90° fa'asagatau fa'asaga mai le fa'amafola muamua ± 5°
2. Eletise Meatotino
●Tetee:
oSemi-insulating (> 106 ^ 66 Ω · cm), lelei mo le faʻaitiitia o le malosi o le parasitic.
●ituaiga Doping:
o Fa'apolopolo fa'afuase'i, e i'u ai i le maualuga o le malosi o le eletise ma le mautu i lalo o le tele o tulaga fa'agaioia.
3. Meatotino vevela
●Thermal Conductivity: 3.5-4.9 W / cm·K, faʻamalosia lelei le faʻafefe o le vevela i faiga faʻamalo maualuga.
●Fa'alili Fa'ainitaneti: 4.2×10−64.2 \times 10^{-6}4.2×10−6/K, fa’amautinoa le mautu o le fua i le taimi o le gaosiga o le vevela.
4. Meatotino Optical
●Bandgap: Lautele bandgap o le 3.26 eV, faʻatagaina le faʻaogaina i lalo o voltage maualuga ma le vevela.
● Transparency: Malamalama maualuga i le UV ma vaʻaia galu umi, aoga mo suʻega optoelectronic.
5. Meatotino Fa'ainisinia
●Maaa: Mohs fua 9, lona lua naʻo taimane, faʻamautinoa le tumau i le taimi o gaioiga.
● Fa'aletonu le Density:
o Fa'atonu mo ni fa'aletonu laiti macro, fa'amautinoa le lava lelei mo fa'aoga fa'atusa.
●Flatness: Tulaga tutusa ma fa'asesega
Parameter | Fa'amatalaga | Vaega |
Vasega | Fa'ailoga Fa'ata | |
Diamita | 150.0 ± 0.5 | mm |
Fa'asinomaga ole Wafer | I luga ole tulaga: <0001> ± 0.5° | tikeri |
Tete'e eletise | > 1E5 | Ω·cm |
Primary Flat Orientation | {10-10} ± 5.0° | tikeri |
Primary Flat Umi | Notch | |
Ta'eta'e (Su'esu'ega o Malamalama Mamalu) | <3 mm i le radial | mm |
Papatusi Hex (Su'esu'ega Malamalama Mamalu) | Vaega fa'aopoopo ≤ 5% | % |
Avanoa Polytype (Su'esu'ega o Malamalama Mamalu) | Vaega fa'aopoopo ≤ 10% | % |
Micropipe Density | <50 | cm−2^-2−2 |
Tu'u pito | 3 faatagaina, taitasi ≤ 3 mm | mm |
Manatua | O le mafiafia o fafie tipi <1 mm, > 70% (e le aofia ai pito e lua) fa'amalieina mana'oga o lo'o i luga. |
Talosaga
1. Fa'ata'ita'iga ma Su'esu'ega
O le dummy-grade 6-inch 4H-SiC ingot o se mea lelei mo le faʻataʻitaʻiga ma suʻesuʻega, faʻatagaina tagata gaosi oloa ma fale suʻesuʻe e:
●Fa'ata'ita'iga fa'agasologa ole su'ega ile Vaivai Vaivai (CVD) po'o Ausa Fa'aletino (PVD).
●Atiae ma fa'alelei le togitogiga, fa'aiila, ma le fa'a'otiina o mea.
●Su'esu'e mamanu fou masini a'o le'i fa'asolo ile mea e gaosia-vaega.
2. Fa'avasegaina o masini ma Su'ega
O meatotino semi-insulating e taua tele lenei ingot mo:
●Su'esu'eina ma fa'avasega mea tau eletise o masini maualuga ma maualuga.
● Fa'ata'ita'iina tulaga fa'atino mo MOSFET, IGBT, po'o diodes i si'osi'omaga su'ega.
● Auauna atu e fai ma sui tau-lelei mo substrates mama-maualuga i le taimi o le amataga-laasaga atinae.
3. Malosiaga Fa'aeletonika
O le maualuga o le vevela ma le lautele o le bandgap uiga o le 4H-SiC e mafai ai ona faʻaogaina lelei i le eletise eletise, e aofia ai:
●Sapalai eletise maualuga.
●Ta'avale eletise (EV) inverters.
●Faiga fa'afouina malosi, e pei ole la fa'aliliuina ole la ma uila afi.
4. Talosaga Leitio (RF).
4H-SiC's maualalo dielectric gau ma maualuga eletise eletise e talafeagai mo:
●RF amplifier ma transistors i atinaʻe fesoʻotaʻiga.
●Faiga faʻapipiʻi maualuga o le radar mo le vateatea ma le puipuiga.
●Vaega feso'ota'iga e leai ni feso'ota'iga mo le fa'atupuina o tekonolosi 5G.
5. Meafaigaluega e Tetee i le Radiation
Ona o lona teteʻe faʻapitoa i faʻafitauli faʻaleagaina, o le semi-insulating 4H-SiC e lelei mo:
●Meafaigaluega su'esu'e o le vanimonimo, e aofia ai satelite fa'aeletonika ma faiga eletise.
●Radiation-faʻaeletonika faʻamalosi mo le mataʻituina ma le pulea faaniukilia.
●Talosaga puipuiga e manaʻomia ai le malosi i siosiomaga ogaoga.
6. Optoelectronics
O le faʻamalamalama manino ma le lautele o le fusi o le 4H-SiC e mafai ai ona faʻaogaina i:
●UV photodetectors ma maualuga-mana LEDs.
●Su'ega fa'apipi'i mata ma togafitiga i luga.
● Fa'ata'ita'iga vaega fa'apitoa mo masini fa'apitoa.
Tulaga lelei o meafai a Dummy-Grade
Tulaga lelei:
O le fa'ailoga fa'alelei o se mea e sili atu ona taugofie i su'esu'ega po'o mea e gaosia ai meafaitino, ma fa'amalieina mo su'ega masani ma fa'aleleia o le fa'agasologa.
Customizability:
Fa'atonu fua ma fa'ata'ita'iga tioata fa'amautinoa le fetaui ma le tele o fa'aoga.
Scalability:
O le 6-inisi le lautele e fetaui lelei ma tulaga tau alamanuia, e mafai ai ona faʻaogaina le faʻaogaina i le gaosiga-vaega faʻagasologa.
Malosi:
O le malosi fa'ainisinia maualuga ma le mautu o le vevela e fa'atumauina ma fa'atuatuaina le ingot i lalo o tulaga fa'ata'ita'iga eseese.
Faigata:
E talafeagai mo le tele o alamanuia, mai le malosi faiga i fesootaiga ma optoelectronics.
Fa'ai'uga
O le 6-inisi Silicon Carbide (4H-SiC) semi-insulating ingot, dummy grade, e ofoina atu se tulaga faʻalagolago ma faʻaogaina mo suʻesuʻega, faʻataʻitaʻiga, ma suʻega i vaega faʻatekonolosi faʻapitoa. O lona uiga fa'apitoa, eletise, ma fa'ainisinia, tu'ufa'atasia ma le gafatia ma le fa'avasegaina, avea ma mea e mana'omia mo a'oga ma alamanuia. Mai le eletise eletise i faiga RF ma masini faʻamalosi faʻamalosi, o lenei ingot e lagolagoina le faʻafouina i laasaga uma o le atinaʻe.
Mo nisi fa'amatalaga au'ili'ili po'o le talosagaina o se fa'amatalaga, fa'amolemole fa'afeso'ota'i sa'o mai. O lo'o sauni la matou 'au fa'atekinisi e fesoasoani i fofo fa'atatau e fetaui ma ou mana'oga.