8inch SiC Gaosia vasega wafer 4H-N SiC substrate

Fa'amatalaga Puupuu:

8-inisi SiC substrates o loʻo faʻaaogaina i masini eletise eletise maualuga, e pei o le malosi MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), Schottky diodes ma isi masini eletise eletise.

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Fa'amatalaga Oloa

Faailoga o oloa

O le laulau o loʻo i lalo o loʻo faʻaalia ai faʻamatalaga o matou 8inch SiC wafers:

8inisi N-ituaiga SiC DSP Fa'amatalaga
Numera	Aitema	Vaega	Gaosiga	Suesuega	Faafoliga
1:parameter
1.1	polytype	--	4H	4H	4H
1.2	fa'asinomaga luga	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Parakalafa eletise
2.1	dopant	--	n-ituaiga Nitrogen	n-ituaiga Nitrogen	n-ituaiga Nitrogen
2.2	teteega	ohm ·cm	0.015~0.025	0.01~0.03	NA
3: Fa'ailoga fa'ainisinia
3.1	lautele	mm	200±0.2	200±0.2	200±0.2
3.2	mafiafia	μm	500±25	500±25	500±25
3.3	Fa'asinomaga notch	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Notch Deep	mm	1~1.5	1~1.5	1~1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	punou	μm	-25~25	-45~45	-65~65
3.8	A'ai	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4: Fa'atulagaga
4.1	micropipe density	ea/cm2	≤2	≤10	≤50
4.2	mea uamea	atoms/cm2	≤1E11	≤1E11	NA
4.3	TSD	ea/cm2	≤500	≤1000	NA
4.4	BPD	ea/cm2	≤2000	≤5000	NA
4.5	TED	ea/cm2	≤7000	≤10000	NA
5.Front uiga lelei
5.1	luma	--	Si	Si	Si
5.2	fa'ai'uga luga	--	Si-foliga CMP	Si-foliga CMP	Si-foliga CMP
5.3	fasimea	ea/wafer	≤100(tele≥0.3μm)	NA	NA
5.4	maosi	ea/wafer	≤5, Aofa'i Length≤200mm	NA	NA
5.5	pito chips/indents/ta'e/pisa/fa'aleagaina	--	Leai	Leai	NA
5.6	Polytype vaega	--	Leai	Vaega ≤10%	Vaega ≤30%
5.7	makaina i luma	--	Leai	Leai	Leai
6:Toe lelei
6.1	tua i'u	--	C-face MP	C-face MP	C-face MP
6.2	maosi	mm	NA	NA	NA
6.3	pito faaletonu tua chips/indents	--	Leai	Leai	NA
6.4	Talatala tua	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Faailoga i tua	--	Notch	Notch	Notch
7:pito
7.1	pito	--	Chamfer	Chamfer	Chamfer
8: Fa'aputu
8.1	afifiina	--	Epi-sauni ma le gaogao afifiina	Epi-sauni ma le gaogao afifiina	Epi-sauni ma le gaogao afifiina
8.2	afifiina	--	Tele-wafer afifiina o kaseti	Tele-wafer afifiina o kaseti	Tele-wafer afifiina o kaseti