8 inisi SiC Production grade wafer 4H-N SiC substrate
O le laulau o loʻo mulimuli mai o loʻo faʻaalia ai faʻamatalaga o a matou wafers SiC 8 inisi:
| Fa'amatalaga o le DSP SiC N-type 8 inisi | |||||
| Numera | Mea | Iunite | Gaosiga | Su'esu'ega | Fa'ata'ita'i |
| 1:parakalafa | |||||
| 1.1 | ituaiga fa'a-polytype | -- | 4H | 4H | 4H |
| 1.2 | fa'atulagaga o luga | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Parakalafa eletise | |||||
| 2.1 | mea fa'aopoopo | -- | Nitrogen ituaiga-n | Nitrogen ituaiga-n | Nitrogen ituaiga-n |
| 2.2 | tete'e | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Fa'ailoga fa'amekanika | |||||
| 3.1 | lautele | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | mafiafia | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Fa'atulagaina o le notch | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Loloto o le Notch | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Aufana | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Fa'alava | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4:Fausaga | |||||
| 4.1 | mafiafia o paipa laiti | ea/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | mea o lo'o i totonu o le u'amea | atomu/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
| 5. Tulaga lelei i luma | |||||
| 5.1 | luma | -- | Si | Si | Si |
| 5.2 | fa'auma o le fogāeleele | -- | Si-foliga CMP | Si-foliga CMP | Si-foliga CMP |
| 5.3 | fasi | ea/wafer | ≤100 (tele ≥0.3μm) | NA | NA |
| 5.4 | valu | ea/wafer | ≤5, Umi Aofa'i ≤200mm | NA | NA |
| 5.5 | Pito fasi/fa'alava/māvaevae/ila/fa'aleagaina | -- | Leai se tasi | Leai se tasi | NA |
| 5.6 | Vaega o le Polytype | -- | Leai se tasi | Eria ≤10% | Eria ≤30% |
| 5.7 | fa'ailoga i luma | -- | Leai se tasi | Leai se tasi | Leai se tasi |
| 6: Tulaga lelei i tua | |||||
| 6.1 | fa'auma tua | -- | MP C-foliga | MP C-foliga | MP C-foliga |
| 6.2 | valu | mm | NA | NA | NA |
| 6.3 | Pito o faaletonu i tua sipa/fa'a'au'au | -- | Leai se tasi | Leai se tasi | NA |
| 6.4 | Ma'a'a o tua | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Fa'ailoga i tua | -- | Notch | Notch | Notch |
| 7: pito | |||||
| 7.1 | pito | -- | Chamfer | Chamfer | Chamfer |
| 8:Afifi | |||||
| 8.1 | afifiina | -- | Sauniuni mo le epi ma le masini e mitiia ai le efuefu afifiina | Sauniuni mo le epi ma le masini e mitiia ai le efuefu afifiina | Sauniuni mo le epi ma le masini e mitiia ai le efuefu afifiina |
| 8.2 | afifiina | -- | Wafer tele afifiina o kaseti | Wafer tele afifiina o kaseti | Wafer tele afifiina o kaseti |
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