Dia300x1.0mmt Mafiafia Safaira Wafer C-Vaeleele SSP/DSP
Folasaga o pusa wafer
Mea tioata | 99,999% o Al2O3, Mama maualuga, Monocrystalline, Al2O3 | |||
Tulaga tioata | Fa'aofi, fa'ailoga poloka, masaga, Lanu, micro-bubbles ma nofoaga fa'asalalau e le o iai. | |||
Diamita | 2 inisi | 3 inisi | 4inisi | 6 inisi ~ 12 inisi |
50.8± 0.1mm | 76.2±0.2mm | 100±0.3mm | E tusa ai ma aiaiga o le gaosiga masani | |
mafiafia | 430±15µm | 550±15µm | 650±20µm | E mafai ona fa'atulagaina e le tagata fa'atau |
Fa'atonuga | C-vaalele (0001) i le M-vaalele (1-100) poʻo le A-vaalele(1 1-2 0) 0.2±0.1° /0.3±0.1°, R-vaalele (1-1 0 2), A-vaalele (1 1-2 0 ), M-vaalele(1-1 0 0), Soo se Fa'asinomaga, So'o se tulimanu | |||
Muamua mafolafola umi | 16.0±1mm | 22.0±1.0mm | 32.5±1.5 mm | E tusa ai ma aiaiga o le gaosiga masani |
Primary flat Orientation | A-vaalele (1 1-2 0 ) ± 0.2° | |||
TTV | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
LTV | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
TIR | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
FUA | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
A'ai | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
Laufanua Luma | Epi-Polisi (Ra<0.2nm) |
* Bow: O le va'aiga o le pito ogatotonu o le vaeluagalemu o le sa'olotoga, e le'i fa'apipi'iina wafer mai le va'alele fa'asino, lea o lo'o fa'amatalaina ai le va'alele fa'asino i tulimanu e tolu o se tafatolu tutusa.
* Warp: O le eseesega i le va o le maualuga ma le mamao aupito maualalo o le vaeluagalemu luga o le fua, e lei pipii wafer mai le vaalele faasinoupu o loo faamatalaina i luga.
O oloa ma auaunaga maualuga mo le isi augatupulaga o masini semiconductor ma le tuputupu aʻe epitaxial:
Tulaga maualuga o le mafolafola (TTV pulea, aufana, warp etc.)
Fa'amama fa'amama maualuga (maualalo le fa'aleagaina o vaega, maualalo le fa'aleagaina o u'amea)
viliina o eleele, togi, tipi, ma faaiila pito i tua
Fa'apipi'i o fa'amaumauga e pei ole mama ma foliga ole mea'ai (filifiliga)
Afai ei ai sau mana'oga mo safaira substrates, fa'amolemole lagona le saoloto e fa'afeso'ota'i:
meli:eric@xkh-semitech.com+86 158 0194 2596 /doris@xkh-semitech.com+86 187 0175 6522
Matou te toe foʻi atu ia te oe i se taimi vave!