Fa'ato'a fa'afa'ato'aga masini fa'ato'aga monocrystalline to'oto'o fa'agaoioiga 6/8/12 inisi luga mafolafola Ra≤0.5μm
Mea faigaluega uiga:
(1) Fa'asologa fa'alua fa'atasi
· Fa'alua le lelei: Fa'agasologa tutusa o la'au silika se lua (Ø6"-12") fa'ateleina le gaosiga e 40% -60% vs. Simplex mea faigaluega.
· Pule tuto'atasi: E mafai e nofoaga ta'itasi ona fetu'una'i tuto'atasi ta'oto'otoga (tete'e, saosaoa fafaga) e fa'afetaui i fa'amatalaga tu'utu'uga o to'a silikoni.
(2) Faʻasaʻo maualuga le tipiina
· Sa'o sa'o: sikuea sikuea itu mamao faapalepale ± 0.15mm, laina ≤0.20mm.
· Tulaga lelei: tipi gau <0.5mm, faʻaitiitia le aofaʻi o le solo mulimuli.
(3) Pulea atamai
· Fa'ata'ita'iina: mata'itūina taimi tonu o le fa'asolo o le to'a kasa, fetuutuuna'iga malosi o le ala tipi (e pei o le fa'agaioiina o le to'oto'o pi'o).
· Su'esu'eina o fa'amaumauga: fa'amaumau fa'asologa o fa'agaioiga o la'au silika ta'itasi e lagolago ai le fa'aogaina o le MES.
(4) Tau taugofie
· Fa'aaogā uaea taimane: ≤0.06m/mm (umi o le tootoo silicon), lautele uaea ≤0.30mm.
· Fa'alili le fa'amalo: O le fa'amama fa'amama e fa'alautele ai le ola tautua ma fa'aitiitia le lafoaia o otaota.
Tekinolosi ma atina'e lelei:
(1) Fa'agata fa'atekinolosi optimization
- Tele laina tipi: 100-200 laina taimane o loʻo faʻaogaina tutusa, ma o le saoasaoa o le tipi o le ≥40mm / min.
- Pulea fa'alavelave: Fa'agata le fa'aogaina o le matasele (±1N) e fa'aitiitia ai le lamatiaga o le motusia o uaea.
(2) Fa'alautelega fetaui
- Fetuunaiga o mea: Lagolago P-ituaiga/N-ituaiga monocrystalline silicon, fetaui ma TOPCon, HJT ma isi maualuga-lelei maa silikon laau.
- Tele fetuutuunai: umi 100-950mm tootoo kasa, mamao itu tootoo sikuea 166-233mm fetuutuunai.
(3) Fa'aleleia o masini
- La'uina ma le la'uina o le Robot: fa'apipi'i otometi/tu'u ese o la'au kasa, sasa ≤3 minute.
- Fa'ata'ita'iga fa'apitoa: Fa'atonuga lelei e fa'aitiitia ai le taimi e le'i fuafuaina.
(4) Ta'ita'i tau alamanuia
- Lagolago Wafer: e mafai ona fa'agaoioia ≥100μm silicon ultra-thin ma sikuea sikuea, fragmentation fua <0.5%.
- Fa'amalieina le fa'aogaina o le malosi: E fa'aitiitia le fa'aaogaina o le malosi i le iunite o le la'au silicon i le 30% (fa'atusatusa i meafaigaluega masani).
Fa'atonuga fa'apitoa:
Igoa o le tapula'a | Fa'asinomaga tau |
Numera o pa ua fa'agaioia | 2 fasi / seti |
Fa'agasologa o le umi o pa | 100~950mm |
Masini laina laina | 166~233mm |
Saosaoa tipi | ≥40mm/min |
Saosaoa uaea taimane | 0~35m/s |
taimane lapoa | 0.30 mm pe itiiti |
Fa'aaogaina laina | 0.06 m/mm pe itiiti |
E fetaui le lautele o le tootoo lapotopoto | Ua mae'a le lautele o le tootoo sikuea +2mm, Fa'amautinoa le fa'aiila o le pasi |
Fa'atonu le gau | Mata mata ≤0.5mm, Leai se tipi, maualuga tulaga maualuga |
Fa'atasi le umi o le au | Fuafuaga va'aiga <1.5mm, Va'a mo le fa'alavelave fa'ameamea |
Fua o masini (masini tasi) | 4800×3020×3660mm |
Aofa'i mana fa'atatau | 56kW |
mamafa mate o meafaigaluega | 12t |
Fa'ailoga sa'o sa'o o masini:
Mea sa'o | Fa'apalepale laina |
Fa'apalepale pito o pa sikuea sikuea | ±0.15mm |
Fa'atafa sikuea pito pito | ≤0.20mm |
Fa'aitu i itu uma o le u'a faatafafa | 90°±0.05° |
Mafolafola o le tootoo faatafafa | ≤0.15mm |
Sa'o sa'o le fa'atulagaina o le robot | ±0.05mm |
Au'aunaga a le XKH:
XKH o loʻo tuʻuina atu auaunaga faʻataʻamilosaga atoa mo masini e lua-nofoaga masini, e aofia ai le faʻaogaina o meafaigaluega (fesoʻotaʻi ma laʻau silikoni tetele), faʻatonuina o le faʻagasologa (faʻaotiina o le parameter), aʻoaʻoga faʻatinoga ma le maeʻa o le faʻatau atu lagolago (faʻatau vaega autu, suʻesuʻega mamao), faʻamautinoa e ausia e tagata faʻatau oloa maualuga (> 99%) ma le faʻaaogaina o tau maualalo, ma tuʻuina atu faʻaleleia faʻapitoa (faʻaleleia). Ole taimi ole tu'uina atu ole 2-4 masina.
Auiliili Ata



