LNOI Wafer (Lithium Niobate i luga ole Insulator) Feso'ota'iga Fa'alogoina Maualuga Electro-Optic
Auiliili Ata
Vaaiga lautele
I totonu o le atigipusa wafer o loʻo i ai faʻailoga tutusa, o ona fua e matua tutusa e lagolago ai itu e lua o le wafer. O le pusa tioata e masani lava ona faia i mea palasitika PP translucent lea e tetee i le vevela, ofuina ma le eletise eletise. O lanu eseese o faʻaopoopoga e faʻaaogaina e iloagofie ai vaega faʻagasologa uʻamea i le gaosiga o le semiconductor. Ona o le laʻititi laʻititi o semiconductors, mamanu mafiafia, ma le mamafa tele o mea e manaʻomia i le gaosiga, o le pusa wafer e tatau ona faʻamaonia se siosiomaga mama e faʻafesoʻotaʻi i le microenvironment box reaction cavity o masini gaosiga eseese.
Faiga Fa'avae
O le fausiaina o LNOI wafers e aofia ai ni laasaga saʻo:
Laasaga 1: Fa'apipi'i o le Helium IonO ion Helium o lo'o fa'aofiina i totonu o se tioata LN tele e fa'aaoga ai se fa'apipi'i ion. O nei ion e momoe i se loloto patino, e fausia ai se vaalele vaivai lea o le a iu ai ina faafaigofieina le vavaeeseina o ata.
Laasaga 2: Fa'avae Fa'avae Fa'avaeO se isi silicon poʻo LN wafer e faʻamaʻiina pe faʻapipiʻiina i le SiO2 e faʻaaoga ai le PECVD poʻo le faʻamaʻiina o le vevela. O lona pito i luga o loʻo faʻatulagaina mo le faʻaogaina lelei.
Laasaga 3: Fa'amauina o le LN i le SubstrateO le tioata LN o lo'o fa'apipi'iina iona e fa'apipi'i ma fa'apipi'i i le fa'amau fa'avae e fa'aaoga ai le fa'apipi'i sa'o. I tulaga suʻesuʻe, benzocyclobutene (BCB) e mafai ona faʻaaogaina e fai ma faʻapipiʻi e faʻafaigofie ai le faʻapipiʻiina i lalo o tulaga faʻaitiitia.
Laasaga 4: Togafitiga vevela ma le vavaeeseina o ataO le fa'afefeteina e fa'aagaoioia ai le fa'atupuina o pulu i le loloto o lo'o totoina, e mafai ai ona tu'u'ese'ese le ata manifinifi (le vaega pito i luga o le LN) mai le tele. O le malosi faʻainisinia e faʻaaogaina e faʻamaeʻa ai le exfoliation.
Laasaga 5: Fa'aliga LaupapaO loʻo faʻaaogaina le Chemical Mechanical Polishing (CMP) e faʻalelei ai le pito i luga o le LN, faʻaleleia atili le lelei ma le gaosiga o masini.
Vaega Fa'atekinisi
| Mea | Optical Vasega LiNbO3 wafe(Pae'e or Lanu uliuli) | |
| Curie Temp | 1142±0.7℃ | |
| Otioti Angle | X/Y/Z ma isi | |
| Diamita/tele | 2”/3”/4” ±0.03mm | |
| Tol(±) | <0.20mm ±0.005mm | |
| mafiafia | 0.18～0.5mm pe sili atu | |
| Peraimeri Mafolafola | 16mm/22mm/32mm | |
| TTV | <3μm | |
| punou | -30 | |
| A'ai | <40μm | |
| Fa'atonuga Mafolafola | E avanoa uma | |
| Laufanua Ituaiga | Itusi Tasi Faila(SSP)/Itu Faalua Faila(DSP) | |
| Faila itu Ra | <0.5nm | |
| S/D | 20/10 | |
| pito Tulaga | R=0.2mm C-ituaiga or Bullnose | |
| Tulaga lelei | Sa'oloto of ta'eta'e(pa'u ma fa'aaofia) | |
| Optical doped | Mg/Fe/Zn/MgO ma isi mo opitika vasega LN wafers i talosagaina | |
| Wafer Laufanua Tulaga | Fa'ailoga fa'afofo | Leai=2.2878/Ne=2.2033 @632nm wavelength/prism coupler method. |
| Fa'aleagaina, | Leai | |
| fasimea c>0.3μ m | <=30 | |
| Su'e, Ta'u | Leai | |
| faaletonu | Leai ni mata ta'e, masi'i, fa'ailoga va'ai, pisia | |
| afifiina | Qty/Wafer pusa | 25pcs i le pusa |
Fa'aoga Tulaga
Ona o lona agavaʻa ma faʻatinoga, o loʻo faʻaaogaina le LNOI i le tele o pisinisi:
Photonics:O mea fa'apipi'i fa'aopoopo, fa'atele, ma fa'ata'ita'i fa'ata.
RF/Acoustics:Acousto-optic modulators, RF filiga.
Quantum Computing:Fa'afefiloi fa'asuavai e le fa'alaina ma fa'aputuga fa'a-photon.
Puipuiga & Aerospace:gyros opitika maualalo maualalo, masini fesuia'i taimi.
Mea Fa'afoma'i:Biosensors mata'utia ma su'ega faailoilo maualuga.
FAQ
F: Aisea e sili ai le LNOI nai lo le SOI i faiga fa'apitoa?
A:O le LNOI o lo'o fa'aalia ai le maualuga o le eletise-optic coefficients ma le lautele o le va'aiga manino, e mafai ai ona sili atu le fa'atinoga i ata fa'ata.
Q: E fa'atulafonoina le CMP pe a uma ona vaeluaina?
A:Ioe. O le fa'aaliga o le LN e talatala pe a mae'a le fa'a'iona ma e tatau ona fa'aiila ina ia fetaui ma fa'amatalaga mata'utia.
Q: O le a le maualuga o le tele o le wafer e maua?
A:O mea'ai fa'atau LNOI fa'apisinisi e 3” ma le 4”, e ui lava o lo'o fa'atupuina e nisi o lo'o fa'atau oloa le 6" fesuiaiga.
Q: E mafai ona toe faʻaaogaina le LN layer pe a uma ona vaeluaina?
A:O le tioata faavae e mafai ona toe fa'aiila ma toe fa'aoga i le tele o taimi, e ui lava e mafai ona fa'aleagaina le lelei pe a uma le tele o ta'amilosaga.
Q: E fetaui LNOI wafers ma le CMOS process?
A:Ioe, ua mamanuina ina ia ogatusa ma faiga masani semiconductor fau, aemaise lava pe a faʻaaogaina meaʻai silicon.
