Microjet leisa meafaigaluega masini wafer tipi SiC meafaitino gaosi

Microjet leisa meafaigaluega masini masi saito tipi SiC meafaitino gaioiga Fa'aalia Ata

Fa'amatalaga Puupuu:

Microjet leisa tekinolosi meafaigaluega o se ituaiga o masini sa'o faiga e tuufaatasia leisa maualuga malosi ma micron-tulaga vai jet. E ala i le faʻapipiʻiina o le laisa leisa i le vaʻavaʻa maualuga-vaavaaia (vai deionized poʻo vai faʻapitoa), e mafai ona iloa le gaosiga o mea ma le maualuga ma le maualalo o le vevela. O lenei tekinolosi e sili ona talafeagai mo le tipiina, viliina ma le faʻaogaina o le microstructure o mea faigata ma mea faʻapitoa (e pei o le SiC, safaira, tioata), ma e faʻaaogaina lautele i semiconductor, faʻaaliga photoelectric, masini faʻafomaʻi ma isi fanua.

Auina imeli ia matou

Fa'amatalaga Oloa

Faailoga o oloa

Fa'avae galue:

1. Feso'ota'iga leisa: leisa pulupulu (UV/lanumeamata/infrared) o lo'o taula'i i totonu o le va'alele vai e fausia ai se alaleo felauaiga malosi.

2. Taʻiala Suavai: vaʻalele televave (vave 50-200m / s) faʻamafanafanaina le vaega o gaioiga ma aveese otaota e aloese ai mai le faʻaputuina o le vevela ma le filogia.

3. Aveesea o mea: O le malosi leisa e mafua ai le cavitation aafiaga i le vai e ausia ai le malulu malulu o mea (vevela afaina sone <1μm).

4. Faʻatonuga faʻamalosi: fetuunaiga taimi moni o faʻamaufaʻailoga laser (malosi, faʻasolosolo) ma le mamafa o le vaalele e faʻafetaui ai manaʻoga o mea eseese ma fausaga.

Fa'ailoga autu:

1. Leisa mana: 10-500W (fa'afetaui)

2. Jet diameter: 50-300μm

3.Machining saʻo: ± 0.5μm (tipi), loloto i le lautele fua faatatau 10:1 (vili)

Tulaga fa'apitoa:

(1) Toeititi lava leai se vevela fa'aleagaina
- O le fa'amalieina o le vai e pulea le sone e a'afia ai le vevela (HAZ) i le **<1μm**, 'alo'ese mai ni ta'eta'ei e mafua mai i le fa'aogaina o leisa (HAZ e masani lava > 10μm).

(2) Ultra-maualuga sa'o machining
- Otiotiina / vili saʻo e oʻo atu i le **±0.5μm**, mata roughness Ra<0.2μm, faʻaitiitia le manaʻoga mo le faʻailoga mulimuli.

- Lagolagoina lavelave 3D fausaga fausaga (e pei o pu conical, slots foliga).

(3) Fa'asoa meafaitino lautele
- Mea malō ma palapalā: SiC, safaira, tioata, sima (o auala masani e faigofie ona malepelepe).

- Mea e maaleale i le vevela: polymers, mea ola ola (leai se lamatiaga o le vevela vevela).

(4) Puipuiga o le siosiomaga ma le lelei
- Leai se pefu filogia, vai e mafai ona toe faʻaaogaina ma faʻamamaina.

- 30% -50% faʻateleina le saoasaoa o le gaosiga (vs. machining).

(5) Pulea atamai
- Tu'ufa'atasia fa'atulagaina va'aiga ma AI fa'ata'ita'iga fa'ata'ita'iga, fetuutuuna'i mafiafia mea ma fa'aletonu.

Fa'amatalaga fa'apitoa:

Volo fa'atatau	300300150	400400200
laina laina XY	afi laina. afi laina	afi laina. afi laina
laina laina Z	150	200
Tulaga sa'o μm	+/-5	+/-5
Sa'o sa'o tu'u fai μm	+/-2	+/-2
Fa'atele G	1	0.29
Pulea numera	3 axis /3+1 axis /3+2 axis	3 axis /3+1 axis /3+2 axis
Ituaiga pulea numera	DPSS Nd:YAG	DPSS Nd:YAG
Umi ole galu nm	532/1064	532/1064
Malosiaga fa'atatau W	50/100/200	50/100/200
Suavai vaalele	40-100	40-100
Pa fa'amuisa fa'amalosi	50-100	50-600
Fua (mea faigaluega masini) (lautele * umi * maualuga) mm	144519442260	170015002120
Tele (kapoti pulea) (W * L * H)	70025001600	70025001600
Mamafa (meafaigaluega) T	2.5	3
Mamafa (kapoti fa'atonu) KG	800	800
Fa'atonuga gafatia	Fa'asaa o luga Ra≤1.6um Saosaoa tatala ≥1.25mm/s Fa'ata'amilosaga tipi ≥6mm/s Saosaoa tipi laina ≥50mm/s	Fa'asaa o luga Ra≤1.2um Saosaoa tatala ≥1.25mm/s Fa'ata'amilosaga tipi ≥6mm/s Saosaoa tipi laina ≥50mm/s
	Mo tioata gallium nitride, ultra-lautele band gap semiconductor mea (taimane / Gallium oxide), aerospace mea faapitoa, LTCC carbon ceramic substrate, photovoltaic, scintillator tioata ma isi mea gaosi. Fa'aaliga: E fesuisuia'i le gafatia ole fa'agaioiina e fa'atatau ile uiga o meafaitino

Fa'asologa o mataupu:

Au'aunaga a le XKH:

XKH o loʻo tuʻuina atu le tele o auaunaga faʻataʻamilosaga o le olaga atoa mo masini tekonolosi leisa microjet, mai le amataga o le atinaʻeina o le atinaʻeina ma le filifilia o meafaigaluega, i le vaeluagalemu o le tuʻufaʻatasia o faiga faʻapitoa (e aofia ai le fetaui faʻapitoa o le laser puna, jet system ma masini masini), i le faʻatinoga mulimuli ma le tausiga o aʻoaʻoga ma le faʻaauauina o le faʻagasologa o le faʻagasologa, o le faagasologa atoa o loʻo faʻapipiʻiina i le lagolago faʻapitoa faʻapolofesa; Faʻavae i luga o le 20 tausaga o le faʻaogaina o masini faʻapitoa, e mafai ona matou tuʻuina atu fofo e tasi e aofia ai le faʻamaonia o meafaigaluega, faʻasalalauga faʻapitoa ma le faʻatau atu vave (24 itula o lagolago faʻapitoa + faʻaagaga vaega faʻapitoa) mo pisinisi eseese e pei o semiconductor ma fomaʻi, ma folafola atu le 12 masina le umi ma le tausiga o le olaga atoa ma le faʻaleleia auaunaga. Ia fa'amautinoa o lo'o fa'atumauina pea e mea faigaluega fa'atau oloa le fa'atinoina o galuega ma le mautu.