Fa'ata'ita'iga Safaira Substrate PSS 2inch 4inch 6inch ICP fa'amago etching e mafai ona fa'aogaina mo meataalo LED.
Uiga autu
1. Uiga o meafaitino: O le mea faʻapipiʻi o se safaira tioata tasi (Al₂O₃), faʻatasi ai ma le maualuga o le maaa, maualuga le vevela ma le faʻamautuina o vailaʻau.
2. Fa'atulagaga o luga: O le pito i luga o loʻo faʻavaeina e le photolithography ma faʻapipiʻi i totonu o fausaga micro-nano taimi, e pei o cones, pyramids poʻo le hexagonal arrays.
3. Fa'atinoga fa'apitoa: E ala i le fa'ata'ita'iga o le fa'asologa o luga, o le aofa'iga atoa o le malamalama i le atina'e e fa'aitiitia, ma fa'aleleia atili le fa'aogaina o le malamalama.
4. Fa'atinoga vevela: Safaira substrate e sili ona lelei le fa'auluina o le vevela, talafeagai mo le maualuga o le mana o le fa'aogaina o le LED.
5. Fua fa'atatau: O lapopo'a masani e 2 inisi (50.8mm), 4 inisi (100mm) ma le 6 inisi (150mm).
Vaega autu o talosaga
1. LED gaosiga:
Faʻaleleia atili le faʻaogaina o le malamalama: PSS faʻaitiitia le gau o le malamalama e ala i le mamanu mamanu, faʻaleleia atili le susulu o le LED ma le faʻamalamalamaina lelei.
Faʻaleleia le lelei o le tuputupu aʻe o le epitaxial: O le fausaga faʻatulagaina e maua ai se faʻavae tuputupu aʻe sili atu mo GaN epitaxial layers ma faʻaleleia le faʻatinoga o le LED.
2. Laser Diode (LD):
Lasers maualuga: O le maualuga o le vevela ma le mautu o le PSS e talafeagai mo le maualuga o le laser diodes, faʻaleleia le faʻaogaina o le vevela ma le faʻamaoni.
La'asaga maualalo o lo'o i ai nei: Fa'ateleina le tuputupu a'e o le epitaxial, fa'aitiitia le fa'agasolo o le laser diode, ma fa'aleleia atili le lelei.
3. Photo detector:
Maaleale maualuga: O le maualuga o le moli ma le maualalo o le faaletonu o le PSS e faʻaleleia ai le lagona ma le saoasaoa o le tali a le photodetector.
Tali fa'aaliga lautele: talafeagai mo le su'esu'eina o le photoelectric i le ultraviolet i le va'aiga va'aia.
4. Malosiaga faaeletonika:
Tete'e maualuga: Safaira's maualuga insulation ma vevela mautu e talafeagai mo masini eletise eletise maualuga.
Fa'amama lelei le vevela: O le maualuga o le vevela e faʻaleleia ai le faʻaogaina o le vevela o masini eletise ma faʻaumi ai le ola tautua.
5. Rf masini:
Ole maualuga ole fa'atinoga: O le maualalo o le dielectric gau ma le maualuga o le vevela ole PSS e talafeagai mo masini RF maualuga.
Le pisapisao maualalo: maualuga mafolafola ma maualalo le tulaga faaletonu fa'aitiitia le pisapisao masini ma fa'aleleia lelei fa'ailoga.
6. Biosensors:
Su'esu'ega maualuga: O le moli maualuga ma le mautu o kemikolo o le PSS e talafeagai mo biosensors maualuga maaleale.
Biocompatibility: O le biocompatibility o le safaira e talafeagai mo togafitiga faafomaʻi ma biodetection talosaga.
Fa'ailoga safaira (PSS) fa'atasi ma mea epitaxial GaN:
Fa'ata'ita'iga safaira substrate (PSS) o se mea lelei mo le GaN (gallium nitride) tuputupu ae epitaxial. Ole lattice tumau ole safaira e latalata ile GaN, lea e mafai ona faʻaitiitia ai le faʻaogaina ole lattice ma faʻaletonu ile tuputupu aʻe o le epitaxial. O le micro-nano structure o le PSS surface e le gata ina faʻaleleia ai le faʻaogaina o le malamalama, ae faʻaleleia atili ai le tulaga tioata o le GaN epitaxial layer, ma faʻaleleia ai le faʻatinoga ma le faʻamaoni o le LED.
Fa'agata fa'atekinisi
| Aitema | Fa'ata'ita'iga Safaira Substrate(2~6inisi) | ||
| Diamita | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| mafiafia | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Fa'asagaga i luga | C-vaalele (0001) ese-matamata agai i le M-axis (10-10) 0.2 ± 0.1° | ||
| C-vaalele (0001) ese-matamata agai i le A-axis (11-20) 0 ± 0.1° | |||
| Primary Flat Orientation | A-Vaeleele (11-20) ± 1.0° | ||
| Primary Flat Umi | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Valele | 9-itula | ||
| Fa'ai'uga i luma | Fa'ata'ita'i | ||
| Fa'ai'uga i tua | SSP: Lelei-eleele, Ra=0.8-1.2um; DSP: Epi-poila, Ra<0.3nm | ||
| Faailoga leisa | Itu i tua | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| FUA | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Tuusaunoaga Tupito | ≤2 mm | ||
| Fa'amatalaga Fa'asologa | Fauga Fa'atusa | Dome, Cone, Pyramid | |
| Maualuluga Mamanu | 1.6~1.8μm | ||
| Ma'aa'a lapoa | 2.75~2.85μm | ||
| Avanoa Mamanu | 0.1~0.3μm | ||
XKH faʻapitoa i le tuʻuina atu o mea e sili ona lelei, faʻapipiʻiina sapphire substrates (PSS) faʻatasi ai ma le lagolago faʻapitoa ma le maeʻa ona faʻatau atu auaunaga e fesoasoani ai i tagata faʻatau e ausia le faʻaleleia lelei i le tulaga o le LED, faʻaaliga ma optoelectronics.
1. Tulaga maualuga PSS: Faʻataʻitaʻiga sapphire substrates i ituaiga eseese (2 ", 4", 6 ") e fetaui ma manaʻoga o le LED, faʻaaliga ma masini optoelectronic.
2. Fuafuaga fa'apitoa: Fa'asinomaga le fa'apipi'i micro-nano i luga (e pei o le cone, pyramid po'o le hexagonal array) e tusa ai ma mana'oga o tagata fa'atau e fa'amalieina le fa'aogaina o le malamalama.
3. Lagolago fa'atekinisi: Tuuina atu le PSS fa'atulagaina o talosaga, fa'agasologa fa'agasologa ma fa'atalanoaga fa'apitoa e fesoasoani ai i tagata fa'atau e fa'aleleia le fa'atinoga o oloa.
4. Epitaxial tuputupu aʻe lagolago: PSS fetaui ma GaN epitaxial mea e saunia e faʻamautinoa ai le maualuga o le maualuga o le tuputupu aʻe o le epitaxial layer.
5. Fa'ata'ita'iga ma fa'amaonia: Tu'u le lipoti ole su'esu'ega lelei ole PSS e fa'amautinoa ai o lo'o fa'amalieina oloa ile tulaga tau alamanuia.
Auiliili Ata
