Silicon carbide taimane uaea tipi masini 4/6/8/12 inisi SiC ingot faagasologa

Fa'amatalaga Puupuu:

Silicon carbide Diamond Uaea tipi masini o se ituaiga o meafaigaluega gaosi maualuga-saʻo tuʻufaʻatasia i le silicon carbide (SiC) ingot fasi, e faʻaaoga ai le tekonolosi Diamond Wire Saw, e ala i le televave feʻaveaʻi uaea taimane (laina lautele 0.1 ~ 0.3mm) i le SiC ingot tele-uaea tipi, e ausia ai le maualuga-saʻo, maualalo-faʻaleagaina wafer sauniuniga. O meafaigaluega e faʻaaogaina lautele i le SiC power semiconductor (MOSFET / SBD), le leitio faʻaogaina masini (GaN-on-SiC) ma optoelectronic masini substrate processing, o se meafaigaluega autu i le filifili alamanuia SiC.

Auina imeli ia matou

Fa'amatalaga Oloa

Faailoga o oloa

Fa'avae galue:

1. Ingot fixation: SiC ingot (4H / 6H-SiC) o loʻo faʻapipiʻiina i luga o le faʻailoga tipi e ala i le mea faʻapipiʻi e faʻamautinoa ai le tulaga saʻo (± 0.02mm).

2. Taimane laina gaioiga: laina taimane (electroplated taimane vaega i luga o le fogaeleele) o loʻo faʻauluina e le taʻiala taʻiala mo le taʻavale maualuga (laina saoasaoa 10 ~ 30m / s).

3. Otioti meaai: o le ingot e fafagaina i luga o le itu faatulagaina, ma o le laina taimane e tipi i le taimi e tasi ma le tele o laina tutusa (100 ~ 500 laina) e fausia ai le tele o wafers.

4. Fa'alili ma le aveeseina o mea'ai: Sausau le mea fa'amalo (vai fa'a-deionize + fa'aopoopo) i le vaega tipi e fa'aitiitia ai le fa'aleagaina o le vevela ma aveese meataalo.

Fa'ailoga autu:

1. Saosaoa tipi: 0.2 ~ 1.0mm / min (faʻalagolago i le faʻataʻitaʻiga tioata ma le mafiafia o SiC).

2. Faʻalavelave laina: 20 ~ 50N (maualuga tele faigofie e momotu laina, maualalo tele aʻafiaga tipi saʻo).

3.Wafer mafiafia: tulaga masani 350 ~ 500μm, wafer e mafai ona ausia 100μm.

Vaega autu:

(1) Sa'o sa'o tipi
Onosa'i mafiafia: ± 5μm (@350μm wafer), sili atu nai lo tipi tipi (± 20μm).

Fa'amata'u i luga: Ra<0.5μm (leai se fa'asili fa'aopoopo e mana'omia e fa'aitiitia ai le aofa'i o gaioiga mulimuli ane).

Warpage: <10μm (faʻaitiitia le faigata o le faʻasolosolo mulimuli ane).

(2) Fa'atonuga lelei
Tele laina tipi: tipiina 100 ~ 500 fasi vaega i le taimi, faʻateleina le gaosiga gafatia 3 ~ 5 taimi (vs. laina laina tasi).

Laina ola: O le laina taimane e mafai ona tipi 100 ~ 300km SiC (faʻalagolago i le maaa o le ingot ma le faʻaogaina o le faagasologa).

(3) Faʻaleagaina le faʻaleagaina
Ta'otoga pito: <15μm (tipi masani> 50μm), fa'aleleia le fua o le wafer.

La'ei fa'aleagaina: <5μm (fa'aitiitia le fa'apololei).

(4) Puipuiga o le siosiomaga ma le tamaoaiga
Leai se fa'aleagaina o sima: Fa'aiti'itia le tau lafoa'iina ole suavai fa'atusa ile tipiina ole sima.

Fa'aaogāina o meafaitino: Otioti gau <100μm/ tipi, fa'asaoina SiC mea mata'utia.

Aafiaga tipi:

1. Fa'alelei lelei: leai ni ta'eta'e mata'utia i luga o le fogā'ele'ele, e itiiti ni fa'aletonu fa'apitoa (fa'alautele le fa'anofoaga e mafai ona pulea). E mafai ona ulufale sa'o i le so'otaga fa'alelei talatala, fa'apu'upu'u le fa'agasologa o le tafe.

2. Faʻatasi: o le mafiafia o le vaʻavaʻa o le wafer i totonu o le paʻu o le <± 3%, talafeagai mo le faʻaogaina otometi.

3.Applicability: Lagolago 4H / 6H-SiC ingot tipi, fetaui ma conductive / semi-insulated ituaiga.

Fa'amatalaga fa'apitoa:

Fa'amatalaga	Fa'amatalaga
Fua (L × W × H)	2500x2300x2500 po'o fa'apitoa
Fa'agaoioiga o meafaitino va'aiga tele	4, 6, 8, 10, 12 inisi o le silikon carbide
Talatala o luga	Ra≤0.3u
Saosaoa tipiina averesi	0.3mm/min
mamafa	5.5t
Otiotiina laasaga faatulagaina o le faagasologa	≤30 laasaga
Pisa o meafaigaluega	≤80 dB
Teuga uaea uamea	0~110N(0.25 uaea vevesi e 45N)
Saosaoa uaea uamea	0~30m/S
Malosi atoa	50kw
Diamita uaea taimane	≥0.18mm
Fa'ai'u mafolafola	≤0.05mm
Fuafua tipi ma gau	≤1% (sei vagana ai mafuaaga o tagata, mea silikoni, laina, tausiga ma isi mafuaaga)

Au'aunaga XKH:

XKH tuuina atu le faagasologa atoa auaunaga o le silicon carbide taimane uaea tipi masini, e aofia ai meafaigaluega filifilia (uaea diameter / uaea saoasaoa fetaui), atinae faagasologa (tipi parameter optimization), consumables tuuina atu (uaea taimane, uili taiala) ma mulimuli-faatau lagolago (tausia meafaigaluega, tipiina auʻiliʻiliga lelei), e fesoasoani i tagata faatau e ausia fua maualuga (> 95%), tau maualalo SiC wafer tele gaosiga. E ofoina atu foʻi faʻaleleia faʻapitoa (e pei o le tipiina o le ultra-thin, otometi utaina ma le laʻuina) faʻatasi ai ma le 4-8 vaiaso taʻitaʻi taimi.