4 inisi SiC Wafers 6H Semi-Insulating SiC Substrates prime, research, ma dummy grade

Fa'amatalaga Pupuu:

O le semi-insulated silicon carbide substrate e fausia e ala i le tipiina, oloina, fa'apala, fa'amamāina ma isi tekinolosi fa'agasologa pe a uma ona tupu a'e le semi-insulated silicon carbide crystal. O se vaega po'o se vaega tele o le crystal layer e totoina i luga o le substrate e ausia ai mana'oga lelei o le epitaxy, ona faia lea o le microwave RF device e ala i le tu'ufa'atasia o le mamanu o le matagaluega ma le afifiina. E maua o le 2inisi 3inisi 4incgh 6inisi 8 inisi alamanuia, su'esu'ega ma su'ega vasega semi-insulated silicon carbide single crystal substrates.

Auina mai se imeli ia i matou

Fa'aaliga

Fa'amatalaga o le Oloa

Vasega			Vasega Gaosiga o le Zero MPD (Vasega Z)			Vasega Gaosiga Masani (Vasega P)		Vasega Fa'ata'ita'i (Vasega D)
Lapoa			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Fa'asinomaga o le Wafer			Ese mai le itu: 4.0° agai i le <1120> ±0.5° mo le 4H-N, I luga o le itu: <0001>±0.5° mo le 4H-SI
	4H-SI		≤1cm^-2			≤5 senitimita^-2		≤15 senitimita^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Fa'asinomaga Laulau Muamua		{10-10} ±5.0°
Umi Mafolafola Autū		32.5 mm±2.0 mm
Umi Mafolafola Lona Lua		18.0 mm±2.0 mm
Fa'asinomaga Mafolafola Lona Lua		Sikoline fa'asaga i luga: 90° CW. mai le Prime flat ±5.0°
Tuusaunoaga o le Pito		3 milimita
LTV/TTV/Aufana/Vau		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Fa'alavelave			foliga C				Polish		Ra≤1 nm
			Si foliga	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Māvaevae o Pito i le Malamalama Malosi		Leai se tasi						Umi fa'aputu ≤ 10 mm, tasi umi≤2 mm
Papa Hex e ala i le Malamalama Malosi Maualuga		Eria fa'aputu ≤0.05%						Eria fa'aputu ≤0.1%
Vaega Polytype e ala i le Malamalama Malosi Maualuga		Leai se tasi						Eria fa'aputu ≤3%
Fa'aaofia o le Carbon Va'aia		Eria fa'aputu ≤0.05%						Eria fa'aputu ≤3%
Maosi o le Silikon i le Malamalama Malosi		Leai se tasi						Umi fa'aputu ≤1＊lautele o le wafer
Fa'amamago Maualuga le Pito i le Malamalama Malosi		E leai se mea e fa'atagaina ≥0.2 mm le lautele ma le loloto						5 fa'atagaina, ≤1 mm ta'itasi
Fa'aleagaina o le Silikon i luga e ala i le malosi tele		Leai se tasi
Afifiina		Kaseti Wafer e tele pe Pusa Wafer e tasi