4H-N/6H-N SiC Wafer Su'esu'ega gaosiga Dummy vasega Dia150mm Silicon carbide substrate

Fa'amatalaga Puupuu:

E mafai ona matou tuʻuina atu le maualuga o le vevela superconducting thin film substrate, mageta manifinifi ata ma ferroelectric thin film substrate, tioata semiconductor, tioata tioata, mea tioata leisa, i le taimi lava e tasi e tuʻuina atu ai le faʻatonuga, tipi tioata, olo, faʻamalosi ma isi auaunaga faʻagaioiga. O matou SiC substrates e sau mai Tankeblue Factory i Saina.

Auina imeli ia matou

Fa'amatalaga Oloa

Faailoga o oloa

6 inisi le lautele silicon carbide (SiC) substrate specification

Vasega	Zero MPD	Gaosiga	Vasega Suesuega	Fa'ailoga Tulaga
Diamita	150.0mm±0.25mm
mafiafia	4H-N	350um±25um
	4H-SI	500um±25um
Fa'asinomaga ole Wafer	I luga ole axis:<0001>±0.5°mo 4H-SI Tu'u ese: 4.0° agai i<1120>±0.5°mo 4H-N
Primary Flat	{10-10}±5.0°
Primary Flat Umi	47.5mm±2.5mm
Fa'aesea pito	3mm
TTV/Afanau/A'au	≤15um/≤40um/≤60um
Micropipe Density	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Resistivity 4H-N 4H-SI	0.015~0.028Ω!cm
	≥1E5Ω!cm
Talatala	Polani Ra ≤1nm CMP Ra≤0.5nm
# Ta'e i le malamalama maualuga	Leai		1 faatagaina ,≤2mm	Fa'aputu umi ≤10mm, tasi umi≤2mm
* Papatusi Hex i le malamalama maualuga	Vaega fa'aopoopo ≤1%		Vaega fa'aopoopo ≤ 2%	Vaega fa'aopoopo ≤ 5%
* Polytype vaega i le malamalama maualuga	Leai		Vaega fa'aopoopo ≤ 2%	Vaega fa'aopoopo ≤ 5%
*&Mase'ese i le malamalama maualuga	3 maosiosia i le 1 x wafer diameter faaputuputu umi		5 matasi i le 1 x wafer diameter fa'aputuga umi	5 masi'i i le 1 x wafer diameter fa'aputuga umi
Tipi pito	Leai		3 faatagaina, ≤0.5mm taitasi	5 faatagaina, ≤1mm taitasi
Fa'aleagaina e le malamalama maualuga	Leai

Fa'atauga & Auaunaga Fa'atau

Fa'atauga o Mea

O le matagaluega fa'atau mea e nafa ma le aoina uma o meafaitino e mana'omia e gaosia ai lau oloa. E maua i taimi uma le su'esu'eina atoatoa o oloa uma ma meafaitino, e aofia ai vaila'au ma su'esu'ega fa'aletino.

Tulaga lelei

I le taimi ma le maeʻa o le gaosiga poʻo le faʻaogaina o au oloa, o loʻo aʻafia le matagaluega o le lelei i le faʻamautinoaina o mea uma ma faʻapalepale e fetaui pe sili atu i lau faʻamatalaga.

Auaunaga

Matou te faʻamaualuga i matou i le i ai o le aufaigaluega faʻainisinia faʻatau ma sili atu i le 5 tausaga le poto masani i le pisinisi semiconductor. Ua a'oa'oina i latou e tali fesili fa'apitoa fa'apea fo'i ma le tu'uina atu o upusii talafeagai mo ou mana'oga.

matou i ou tafatafa i soʻo se taimi pe a iai sau faʻafitauli, ma foia i le 10hours.