Otometi atoatoa mama masi-oti Meafaigaluega Laele Galulue 8insi/12 inisi mama mama tipi.
Fa'agata fa'atekinisi
| Parameter | Vaega | Fa'amatalaga |
| Ole Tele ole Meafaigaluega | mm | ø12" |
| Spindle | Fa'atonuga | Tafala Tasi |
| Saosaoa | 3,000–60,000 rpm | |
| Malosi o Galuega | 1.8 kW (2.4 faitalia) ile 30,000 min⁻¹ | |
| Max Blade Dia. | Ø58 mm | |
| X-Axis | Vaava'a | 310 mm |
| Y-Axis | Vaava'a | 310 mm |
| Laasaga Faaopoopo | 0.0001 mm | |
| Tulaga Sa'o | ≤0.003 mm/310 mm, ≤0.002 mm/5 mm (sese tasi) | |
| Z-Axis | I'uga o Gaoioiga | 0.00005 mm |
| Toe fai | 0.001 mm | |
| θ-Axis | Max Rotation | 380 deg |
| Ituaiga Spindle | Milo ta'itasi, fa'aauupegaina i le lau malo mo le tipiina o mama | |
| Sa'o o le tipiina o mama | μm | ±50 |
| Sa'o Tulaga Wafer | μm | ±50 |
| Tasi-Wafer Lelei | min/wafer | 8 |
| Tele-Wafer Lelei | E o'o atu i le 4 wafers e fa'agaioia i le taimi e tasi | |
| Mamafa Meafaigaluega | kg | ≈3,200 |
| Fua o Meafaigaluega (W×D×H) | mm | 2,730 × 1,550 × 2,070 |
Fa'atonuga Fa'atino
O le faiga e ausia ai le faʻatinoina o le tipiina faʻapitoa e ala i nei tekinolosi autu:
1.Intelligent Motion Control System:
· Sa'o sa'o le ta'avale afi laina (toe fai le sa'o sa'o: ±0.5μm)
· Six-axis synchronous control e lagolagoina ai fuafuaga lavelave o ala
· Taimi moni e taofia ai le vibration algorithms faʻamautinoaina le mautu o le tipi
2. Faiga Fa'amatalaga Fa'apitoa:
· Fa'atasi 3D leisa maualuga masini (sa'o: 0.1μm)
· Tulaga va'aia CCD maualuga (5 megapixels)
· Su'ega tulaga lelei i luga ole laiga
3. Fully Automated Process:
· Otometi le utaina ma le la'uina (FOUP standard interface e fetaui)
· Faiga fa'avasega atamai
· Vaega fa'amama tapuni (mama: Vasega 10)
Talosaga masani
O lenei meafaigaluega e tu'uina atu le taua tele i le fa'aogaina o le gaosiga o semiconductor:
| Talosaga Field | Meafai Fa'agasologa | Tulaga Fa'apitoa |
| IC gaosiga | 8/12" Silicon Wafers | Fa'aleleia le fa'aogaina o lithography |
| Masini Malosi | SiC/GaN Wafers | Puipuia le faaletonu pito |
| MEMS Sensors | SOI Wafers | Faʻamautinoa le faʻamaoni o masini |
| RF masini | GaAs Wafers | Faʻaleleia le faʻatinoina o taimi maualuga |
| Fa'apipi'i Maualuga | Wafers Toe Fa'aopoopo | Faʻateleina fua faʻapipiʻi |
Vaega
1.Four-nofoaga fetuutuunai mo le maualuga o le gaosiga lelei;
2.Stable TAIKO mama debonding ma aveese;
3. maualuga feso'ota'iga ma mea fa'aaoga autu;
4. Tele-axis synchronous trimming tekinolosi fa'amautinoa le sa'o sa'o le tipi;
5.Fully fa'autometi fa'agasolo fa'agasolo fa'aitiitiga fa'aitiitia tau faigaluega;
6.Customized worktable design e mafai ai ona fa'agasolo le fa'atulagaina o fausaga fa'apitoa;
Galuega
1. Fa'amama-pa'u faiga su'esu'e;
2. Fa'amamaina otometi laulau faigaluega;
3.Intelligent UV debonding faiga;
4. Fa'amaumauga ogalaau gaogao;
5.Factory otometi module tu'ufa'atasi;
Tautinoga Auaunaga
O lo'o tu'uina atu e le XKH 'au'aunaga lagolago atoatoa, atoa o le olaga fa'atulagaina e fa'ateleina ai le fa'atinoga o masini ma le fa'atinoina lelei i lau malaga gaosiga.
1. Au'aunaga Fa'apitoa
· Fa'atulagaina Meafaigaluega Fa'atonu: O lo'o galulue fa'atasi le matou 'au fa'ainisinia ma tagata fa'atau e fa'amanino fa'asologa o faiga (saosaoa tipi, filifili lau, ma isi) fa'avae i luga o meatotino fa'apitoa (Si/SiC/GaAs) ma mana'oga fa'agasologa.
· Lagolago Atina'e Fa'agasologa: Matou te ofoina atu fa'ata'ita'iga fa'ata'ita'iga fa'atasi ai ma fa'amatalaga au'ili'ili e aofia ai le fuaina o le mata ma le fa'afanua fa'aletonu.
· Fa'aaogāina Fa'atasi: Mo mea fou (fa'ata'ita'iga, Ga₂O₃), matou te faipa'aga ma ta'ita'i gaosi oloa fa'aaogā e atia'e lau fa'aoga-fa'apitoa/laser optics.
2. Lagolago Tomai Fa'apitoa
· Lagolago Tu'ufa'atasi i luga ole Nofoaga: Tofi ni inisinia fa'amaonia mo fa'alavelave fa'aletonu (e masani lava 2-4 vaiaso), e aofia ai:
Fa'ata'otoga o meafaigaluega ma fa'agasolo fa'alelei
A'oa'oga agava'a fa'afoe
ISO Vasega 5 potu mama ta'iala tu'ufa'atasiga
· Tausiga Va'ai: Su'esu'ega fa'alekuata fa'atasi ma su'esu'ega vibration ma su'esu'ega afi afi e puipuia ai le taimi e le'i fuafuaina.
· Mata'ituina mamao: Su'esu'eina fa'atinoga o mea faigaluega i le taimi tonu e ala i la tatou IoT platform (JCFront Connect®) fa'atasi ai ma fa'aliga fa'aletonu otometi.
3. Au'aunaga Fa'aopoopo Tau
· Fa'agasolo Fa'aa'oa'oga Fa'avae: Avanoa 300+ fa'amaonia fuala'au tipi mo mea 'ese'ese (fa'afouina ta'ikuata).
· Fa'atekonolosi Fa'asologa o Fa'afanua: Fa'amautu i le lumana'i lau tupe fa'afaigaluega i ala fa'aleleia o masini/polokalame (fa'ata'ita'iga, fa'ailoga fa'aletonu e fa'avae AI).
· Tali Fa'alavelave Fa'afuase'i: Fa'amaonia le 4-itula mamao su'esu'ega ma le 48-itula i luga ole nofoaga fa'alavelave (fa'asalalauga fa'avaomalo).
4. Atina'e Au'aunaga
· Fa'amautinoaga Fa'atinoga: Ta'utinoga fa'akonekarate i le ≥98% taimi fa'aoga meafaigaluega fa'atasi ai ma taimi e tali atu ai SLA.
Fa'aleleia Fa'aauau
Matou te fa'atautaia su'esu'ega fa'amalieina o tagata fa'atau ta'i lua ma fa'atino fuafuaga a Kaizen e fa'aleleia ai le tu'uina atu o auaunaga. O la matou vaega R&D e fa'aliliuina fa'amatalaga fanua i fa'aleleia o meafaigaluega - 30% o fa'aleleia atili o le firmware e afua mai i manatu o tagata o tausia.
