12 inisi Sa'o Ma'oti Sa'o Sa'o Va'ai Meafaigaluega Wafer Fa'apa'iaina tipi tipi mo Si/SiC & HBM (Al)
Fa'agata fa'atekinisi
Parameter | Fa'amatalaga |
Tele Galuega | Φ8", Φ12" |
Spindle | Itusi-lua 1.2/1.8/2.4/3.0, Max 60000 rpm |
Tele ole Lau | 2" ~ 3" |
Tu'u Y1 / Y2
| Laasaga tasi fa'aopoopoga: 0.0001 mm |
Tulaga sa'o: <0.002 mm | |
Va'aiga tipi: 310 mm | |
X Axis | Va'aiga saoasaoa fafaga: 0.1–600 mm/s |
Tu'u Z1 / Z2
| Laasaga tasi fa'aopoopoga: 0.0001 mm |
Tulaga sa'o: ≤ 0.001 mm | |
θ Tu'u | Tulaga sa'o: ±15" |
Nofoaga Fa'amamaina
| Saosaoa o le taamilosaga: 100–3000 rpm |
Auala fa'amamā: Fufulu ta'avale & fa'agogo | |
Galulue Malolo | 3-vaega 380V 50Hz |
Fua (W×D×H) | 1550×1255×1880 mm |
mamafa | 2100 kilokalama |
Fa'avae Galuega
O meafaigaluega e ausia le maualuga-saʻo tipiina e ala i tekinolosi nei:
1.High-Rigidity Spindle System: Saosaoa suiga i le 60,000 RPM, faʻapipiʻiina i lau taimane poʻo le faʻaulu leisa e faʻafetaui i mea totino eseese.
2.Multi-Axis Motion Control: X / Y / Z-axis faʻatulagaina saʻo o le ± 1μm, faʻapipiʻi faʻatasi ma le maualuga-saʻo fua faʻamau e faʻamautinoa ai le vavaeeseina o auala e leai se totogi.
3.Intelligent Visual Alignment: High-resolution CCD (5 megapixels) e otometi lava ona iloa le tipiina o auala ma tauia mo mea taua poʻo le faʻaogaina.
4.Cooling & Pefu Ave'esea: Tu'ufa'atasi vai mama faiga malulu ma le gaogao suction pefu aveese e fa'aitiitia le a'afiaga vevela ma le fa'aleagaina o vaega.
Faiga tipi
1.Blade Dicing: E talafeagai mo mea masani semiconductor e pei o Si ma GaAs, ma le lautele o le kerf o 50-100μm.
2.Stealth Laser Dicing: Fa'aaogaina mo mea e sili ona manifinifi (<100μm) poʻo mea maʻaleʻale (faʻataʻitaʻiga, LT / LN), faʻatagaina le vavaeeseina o le popole.
Talosaga masani
Mea e fetaui lelei | Talosaga Field | Tulaga Manaomia |
Siliko (Si) | ICs, MEMS sensors | Otiotiina maualuga, tipi <10μm |
Silicon Carbide (SiC) | Masini eletise (MOSFET/diodes) | Fa'aleaga fa'aleaga tipi, fa'alelei pulega fa'amama |
Gallium Arsenide (GaAs) | RF masini, meataalo optoelectronic | Puipuia micro-ta'eta'e, pulea mama |
LT/LN Substrates | Sa'ili filiga, fa'aogaina opitika | Otioti e leai se fa'alavelave, fa'asaoina mea piezoelectric |
La'au Sima | Module eletise, afifiina LED | Fa'atosina meafaitino maualuga, mafolafola pito |
Fua QFN/DFN | Fa'apipi'i maualuga | Tele-chip tipi faʻatasi, faʻaleleia lelei |
WLCSP Wafers | afifiina tulaga mama | Fa'aleaga e leai se fa'aleagaina o u'amea manifinifi (50μm) |
Tulaga lelei
1. Va'aiga fa'avaa kaseti maualuga-saosaoa ma fa'ailo fa'alavelave fa'afuase'i, fa'anofo fa'avavevave, ma malosi fa'asa'o mea sese.
2. Optimized faiga tipi-spindle lua, faʻaleleia lelei e tusa ma le 80% faʻatusatusa i faiga taʻitasi-spindle.
3. Fa'ato'a fa'aulufale mai polo sikulima, laina ta'iala, ma Y-axis grating fua tapuni tapuni fa'atonutonu, fa'amautinoa le mautu umi o masini maualuga-sa'o.
4. Otometi atoatoa utaina / la'u ese, fesiitaiga tulaga, alignment tipi, ma le su'esu'ega o le kerf, fa'aitiitia le tele o galuega a le fa'afoe (OP).
5.Gantry-style faʻapipiʻi fausaga faʻapipiʻi, faʻatasi ai ma le laʻititi lua-lau o le va o le 24mm, e mafai ai ona faʻafesoʻotaʻi lautele mo faiga faʻapipiʻi lua-spindle.
Vaega
1.High-saʻo atoatoa e le faʻafesoʻotaʻi fua maualuga.
2. Multi-wafer lua-lau e tipi i luga o se fata e tasi.
3. Fa'avasegaina otometi, su'esu'ega o le kerf, ma faiga fa'amata'i mata.
4.Supports faiga eseese ma filifili otometi alignment algorithms.
5. Fault fa'asa'o galuega fa'atino ma taimi moni mata'itū-tulaga.
6. Ulua'i-oti asiasiga gafatia pe'a-muamua dicing.
7.Customizable falegaosimea masini masini ma isi galuega fai filifiliga.
Auaunaga Meafaigaluega
Matou te tuʻuina atu le lagolago atoatoa mai meafaigaluega filifilia i le tausiga umi:
(1) Atina'e Fa'apitoa
· Fautuaina vaifofo tipiina o lau/laisa e fa'atatau i meafaitino (fa'ata'ita'iga, SiC ma'a'a, GaAs brittleness).
· Tuuina atu fua fa'ata'ita'iga fa'ata'ita'iga e fa'amaonia ai le lelei o le tipiina (e aofia ai le tipi, lautele o le kerf, fa'afefe o luga, ma isi).
(2) Aoaoga Faapitoa
· Aʻoaʻoga Autu: Faʻaogaina o meafaigaluega, fetuunaiga faʻamau, tausiga masani.
· A'oa'oga A'oa'oga: Fa'atonuga fa'agasolo mo mea lavelave (fa'ata'ita'iga, tipiina e aunoa ma se fa'alavelave o mea LT).
(3) Lagolago ina ua uma ona faatau atu
· Tali 24/7: Su'esu'ega mamao po'o fesoasoani ile nofoaga.
· Sapalai o Vaega Fa'asao: O mea fa'apipi'i, lau, ma vaega fa'apitoa mo le vave suia.
· Tausiga Puipuia: Fa'asologa masani e fa'atumauina le sa'o ma fa'alautele le ola tautua.

O Tatou Fa'amanuiaga
✔ Aafiaga Alamanuia: Auauna atu i le 300+ i le lalolagi atoa semiconductor ma mea tau eletise.
✔ Fa'atekonolosi Mata'utia: O ta'iala laina sa'o ma faiga servo e fa'amautinoa ai le mautu e ta'imua i alamanuia.
✔ Feso'ota'iga Au'aunaga Lautele: Va'aiga i Asia, Europa, ma Amerika i Matu mo lagolago fa'apitonu'u.
Mo su'ega po'o su'esu'ega, fa'afeso'ota'i matou!

