SiC substrate 3inisi 350um le mafiafia HPSI ituaiga Prime Grade Dummy grade
Meatotino
| Fa'atulagaga | Vasega o le Gaosiga | Vasega o Suesuega | Vasega Fa'ata'ita'i | Iunite |
| Vasega | Vasega o le Gaosiga | Vasega o Suesuega | Vasega Fa'ata'ita'i | |
| Lapoa | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
| Mafiafia | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
| Fa'asinomaga o le Wafer | I luga o le 'au: <0001> ± 0.5° | I luga o le 'au: <0001> ± 2.0° | I luga o le 'au: <0001> ± 2.0° | tikeri |
| Mafiafia o le Maikopipa (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm−2^-2−2 |
| Tete'e Fa'aeletise | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
| Dopant | Ua le toe fa'aaogaina | Ua le toe fa'aaogaina | Ua le toe fa'aaogaina | |
| Fa'asinomaga Laulau Muamua | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | tikeri |
| Umi Mafolafola Autū | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
| Umi Mafolafola Lona Lua | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
| Fa'asinomaga Mafolafola Lona Lua | 90° CW mai le mafolafola autū ± 5.0° | 90° CW mai le mafolafola autū ± 5.0° | 90° CW mai le mafolafola autū ± 5.0° | tikeri |
| Tuusaunoaga o le Pito | 3 | 3 | 3 | mm |
| LTV/TTV/Aufana/Vau | 3 / 10 / ±30 / 40 | 3 / 10 / ±30 / 40 | 5 / 15 / ±40 / 45 | µm |
| Ma'ale'ale o le fogā'ele'ele | Si-fofoga: CMP, C-fofoga: Fa'apupula | Si-fofoga: CMP, C-fofoga: Fa'apupula | Si-fofoga: CMP, C-fofoga: Fa'apupula | |
| Māvaevae (Moli Malosi) | Leai se tasi | Leai se tasi | Leai se tasi | |
| Papa Hex (Moli Malosi Maualuga) | Leai se tasi | Leai se tasi | Eria fa'aputu 10% | % |
| Vaega Polytype (Moli Malosi Maualuga) | Eria fa'aputu 5% | Eria fa'aputu 20% | Eria fa'aputu 30% | % |
| Maosi (Moli Malosi) | ≤ 5 maosi, umi fa'aputu ≤ 150 | ≤ 10 maosi, umi fa'aputu ≤ 200 | ≤ 10 maosi, umi fa'aputu ≤ 200 | mm |
| Fa'apala'au o le Pito | Leai se mea ≥ 0.5 mm le lautele/loloto | 2 fa'atagaina ≤ 1 mm lautele/loloto | 5 fa'atagaina ≤ 5 mm lautele/loloto | mm |
| Fa'aleagaina o le Luga | Leai se tasi | Leai se tasi | Leai se tasi |
Talosaga
1. Mea Fa'aeletoronika Malosiaga Maualuga
O le maualuga o le conductivity thermal ma le lautele o le bandgap o SiC wafers e avea ai ma mea lelei mo masini eletise maualuga, maualuga le televave:
●MOSFET ma IGBT mo le liua o le eletise.
● Faiga fa'aeletise fa'aonaponei mo ta'avale eletise, e aofia ai inverters ma chargers.
●Fa'avae tau feso'ota'iga atamai ma faiga fa'afouina o le malosiaga.
2. Faiga RF ma Maikoloveve
E mafai e substrates SiC ona faʻaogaina le RF maualuga ma le microwave ma le itiiti ifo o le leiloa o faailoilo:
● Faiga feso'ota'iga ma satelite.
●Faiga o radar vaalele.
●Vaega feso'ota'iga 5G fa'aonaponei.
3. Optoelectronics ma Sensors
O meatotino tulaga ese o le SiC e lagolagoina ai le tele o faʻaoga optoelectronic:
●Mea e iloa ai UV mo le mata'ituina o le siosiomaga ma le iloa o alamanuia.
●Mea fa'apipi'i LED ma le laser mo moli mautu ma meafaigaluega sa'o.
●Sensoga e fa'avevela maualuga mo alamanuia o le ea ma ta'avale.
4. Suesuega ma Atina'e
O le eseese o vasega (Gaosiga, Suesuega, Mea Fa'ata'ita'i) e mafai ai ona faia fa'ata'ita'iga fa'aonaponei ma faia ai fa'ata'ita'iga o masini i totonu o a'oa'oga maualuluga ma pisinisi.
Fa'amanuiaga
●Fa'atuatuaina:Tete'e lelei ma le mautu i vaega eseese.
●Fa'apitoaina:Fa'atulagaga ma mafiafia fa'apitoa e fetaui ma mana'oga eseese.
●Mama Maualuga:O le tu'ufa'atasiga e le'i fa'afefiloi e fa'amautinoa ai le itiiti o suiga e feso'ota'i ma mea leaga.
●Fa'ateleina:Fa'ataunu'uina mana'oga o le gaosiga tele ma su'esu'ega fa'ata'ita'i.
O wafers SiC mama e 3-inisi o lau faitotoʻa lea i masini faʻatino maualuga ma faʻatekonolosi fou. Mo fesili ma faʻamatalaga auiliili, faʻafesoʻotaʻi matou i le aso.
Aotelega
O Wafers Silikon Carbide (SiC) e 3-inisi le maualuga, o loʻo maua i le gaosiga, suʻesuʻega, ma le Dummy Grades, o ni substrates sili ona lelei ua mamanuina mo eletise malolosi, RF/microwave systems, optoelectronics, ma R&D faʻapitoa. O nei wafers e iai uiga e leʻi faʻapipiʻiina, semi-insulating ma le resistivity sili ona lelei (≥1E10 Ω·cm mo le Production Grade), maualalo le mafiafia o micropipe (≤1 cm−2^-2−2), ma le tulaga lelei o le fogaeleele. Ua faʻaleleia mo faʻaoga maualuga le faʻatinoga, e aofia ai le liua o le eletise, fesoʻotaʻiga, UV sensing, ma tekinolosi LED. Faatasi ai ma faʻatulagaga e mafai ona fetuʻunaʻi, sili atu le conductivity o le vevela, ma meatotino faʻainisinia malolosi, o nei wafers SiC e mafai ai ona faia lelei ma faʻatuatuaina le gaosiga o masini ma faʻafouga fou i pisinisi eseese.
Ata Auiliili
